接口 SSI$n測量長度 25~5500 mm$n重復精度 ≤ ± 5 µm$n$n$n$n$n$n巴魯夫BALLUFF位移傳感器$n線性偏差d = 1, 2, 3, 7: ± 30µm, d = 4, 5, 6, 8: ± 2 LSB$n工作電壓Ub 10~30 VDC$n環境溫度 -40...60 °C